Dynamics of electrostatic microelectromechanical systems actuators

DOI10.1063/1.3684748zbMath1274.74050arXiv1201.5439OpenAlexW1977847933MaRDI QIDQ2861712

Yisong Yang, Le Zhao, Rui-feng Zhang

Publication date: 11 November 2013

Published in: Journal of Mathematical Physics (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1201.5439

Mathematics Subject Classification ID

Analytic approximation of solutions (perturbation methods, asymptotic methods, series, etc.) of dynamical problems in solid mechanics (74H10) Electromagnetic effects in solid mechanics (74F15) Micromechanical theories (74A60) Technical applications of optics and electromagnetic theory (78A55) Electro- and magnetostatics (78A30) Stochastic and other probabilistic methods applied to problems in solid mechanics (74S60)

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• Nonlinear non-local elliptic equation modelling electrostatic actuation