MEMS Sensor of Force (Q3299294)

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MEMS Sensor of Force
scientific article

    Statements

    title
    MEMS Sensor of Force (English)
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    author
    René Harťanský
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    Jaroslav Hricko
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    Martin Mierka
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    Ján Halgoš
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    Michal Dzuriš
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    publication date
    22 July 2020
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    zbMATH Keywords
    compact compliant mechanical body
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    transfer response
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    Identifiers

    DOI
    10.20537/nd200107
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    zbMATH DE Number
    7224062
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