MEMS sensor of force

DOI10.20537/ND200107zbMATH Open1452.74083OpenAlexW4254922515MaRDI QIDQ3299294FDOQ3299294

Authors: René Harťanský, Jaroslav Hricko, Martin Mierka, Ján Halgoš, Michal Dzuriš 

Publication date: 22 July 2020

Published in: Nelineinaya Dinamika (Search for Journal in Brave)

Full work available at URL: http://mathnet.ru/eng/nd698

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zbMATH Keywords

transfer responsecompact compliant mechanical body

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05)

Cited In (4)

• Title not available (Why is that?)
• Measuring transducer of geometrical and mechanical quantities with capacity sensors
• A force-torque sensor based on a Stewart platform in a near-singular configuration
• Force Sensing in Magnitude, Direction, and Position

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