Measuring transducer of geometrical and mechanical quantities with capacity sensors

zbMATH Open1399.93021MaRDI QIDQ4565675FDOQ4565675

Authors: R. S. Lezhoyev 

Publication date: 12 June 2018

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zbMATH Keywords

measurementcapacitycompensationsensor

Mathematics Subject Classification ID

Observability (93B07) Geometric methods (93B27)

Cited In (2)

• Analytical calculation of sensitivity for capacitive pressure transducers
• MEMS sensor of force

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