Heterogeneous Dielectric Properties in Models for Microelectromechanical Systems (Q4603769)
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scientific article; zbMATH DE number 6840351
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English | Heterogeneous Dielectric Properties in Models for Microelectromechanical Systems |
scientific article; zbMATH DE number 6840351 |
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Heterogeneous Dielectric Properties in Models for Microelectromechanical Systems (English)
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19 February 2018
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MEMS
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free boundary problem
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transmission problem
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vanishing aspect ratio
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variational inequality
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