Concepts and algorithms in process simulation (Q688756)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Concepts and algorithms in process simulation |
scientific article |
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Concepts and algorithms in process simulation (English)
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6 December 1993
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For the general-purpose \(2D\) process simulator MIMAS-II -- elaborated for semiconductor devices on a silicon basis -- the essential numerical algorithms are discussed. The two basic problems are: the processing of the geometrical device structure and the determination of the field quantities, both being closely coupled.
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process simulation
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adaptive grid refinement
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finite elements
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\(2D\) process simulator MIMAS-II
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semiconductor devices
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numerical algorithms
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geometrical device structure
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