Analysis of a model for imaging in photolithography (Q909139)
From MaRDI portal
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | Analysis of a model for imaging in photolithography |
scientific article |
Statements
Analysis of a model for imaging in photolithography (English)
0 references
1989
0 references
time dependent Maxwell equation
0 references
photolithography
0 references
limiting absorption principle
0 references
contraction mapping theorem
0 references