Fluid flow and transport processes in a large area atmospheric pressure stagnation flow CVD reactor for deposition of thin films (Q2573672)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Fluid flow and transport processes in a large area atmospheric pressure stagnation flow CVD reactor for deposition of thin films |
scientific article |
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Fluid flow and transport processes in a large area atmospheric pressure stagnation flow CVD reactor for deposition of thin films (English)
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22 November 2005
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Computer simulation
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Fluid flows
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Chemical vapor deposition processes
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