Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (Q259298)

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Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method
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    title
    Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (English)
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    author
    V. V. Lopushenko
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    publication date
    11 March 2016
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