Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (Q259298)
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scientific article; zbMATH DE number 6554217
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| English | Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method |
scientific article; zbMATH DE number 6554217 |
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Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (English)
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11 March 2016
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wave scattering
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diffraction
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integral equations
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mathematical modeling
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nanostructures
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0.8844472765922546
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0.8236547708511353
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0.7975826859474182
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0.7677175402641296
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