Analysis of inhomogeneities on wafers by the integral transform method (Q5951165)
From MaRDI portal
!
This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use the normal view instead:
scientific article; zbMATH DE number 1685250
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Analysis of inhomogeneities on wafers by the integral transform method |
scientific article; zbMATH DE number 1685250 |
Statements
Analysis of inhomogeneities on wafers by the integral transform method (English)
0 references
14 August 2002
0 references
impurity particles
0 references
wafer surface
0 references
scattering
0 references
integral transform method
0 references
0 references
0.7677175402641296
0 references
0.7654234170913696
0 references
0.7158100605010986
0 references
0.7063775658607483
0 references
