Analysis of inhomogeneities on wafers by the integral transform method

DOI10.1007/BF02754310MaRDI QIDQ5951165zbMATH OpenFDO

Authors Yu. A. Eremin, V. I. Ivakhnenko

Publication date 14 August 2002

Published in Differential Equations (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/BF02754310

zbMATH Keywords

impurity particlesintegral transform methodscatteringwafer surface

Mathematics Subject Classification ID

Electromagnetic theory (general) (78A25) Technical applications of optics and electromagnetic theory (78A55)

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• Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method
• Strict and approximate models of a scratch on the basis of the method of integral equations
• Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method
• Modeling aspects to improve the solution of the inverse problem in scatterometry

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