Modeling aspects to improve the solution of the inverse problem in scatterometry

DOI10.3934/DCDSS.2015.8.497zbMATH Open1304.35766OpenAlexW2326105196MaRDI QIDQ479110FDOQ479110

Authors: Hermann Gross, Sebastian Heidenreich, Mark-Alexander Henn, Markus Bär, Andreas Rathsfeld 

Publication date: 5 December 2014

Published in: Discrete and Continuous Dynamical Systems. Series S (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.3934/dcdss.2015.8.497

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zbMATH Keywords

inverse problemMonte Carlo methodFisher matrixuncertaintiesFourier opticsscatterometryerror modelline edge roughness

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Scattering theory, inverse scattering involving ordinary differential operators (34L25) Scattering theory for PDEs (35P25) Inverse problems for PDEs (35R30) Numerical methods for discrete and fast Fourier transforms (65T50)

Cites Work

• The partition of unity finite element method: basic theory and applications
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• Finite element analysis of acoustic scattering
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• Modeling and optimal design of diffractive optical structures
• Maximum likelihood estimation and inference. With examples in R, SAS and ADMB
• Convergence of the Galerkin Method for Two-Dimensional Electromagnetic Problems
• Diffraction, Fourier Optics and Imaging
• A frequency-domain formulation of the Fréchet derivative to exploit the inherent parallelism of the distorted Born iterative method
• Finite element solution of conical diffraction problems

Cited In (5)

• A comparison of scattering angle models
• Sensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures
• Model-assisted SCAD calibration for non-probability samples
• Modeling of mask diffraction and projection imaging for advanced optical and EUV lithography
• A model function method for determining the regularizing parameter in potential approach for the recovery of scattered wave

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