Modeling aspects to improve the solution of the inverse problem in scatterometry
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Publication:479110
DOI10.3934/dcdss.2015.8.497zbMath1304.35766MaRDI QIDQ479110
Mark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, Markus Bär, Andreas Rathsfeld
Publication date: 5 December 2014
Published in: Discrete and Continuous Dynamical Systems. Series S (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.3934/dcdss.2015.8.497
inverse problem; Monte Carlo method; uncertainties; Fisher matrix; Fourier optics; scatterometry; error model; line edge roughness
65C05: Monte Carlo methods
35P25: Scattering theory for PDEs
35R30: Inverse problems for PDEs
65T50: Numerical methods for discrete and fast Fourier transforms
34L25: Scattering theory, inverse scattering involving ordinary differential operators
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