Modeling aspects to improve the solution of the inverse problem in scatterometry

DOI10.3934/dcdss.2015.8.497zbMath1304.35766MaRDI QIDQ479110

Mark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, Markus Bär, Andreas Rathsfeld

Publication date: 5 December 2014

Published in: Discrete and Continuous Dynamical Systems. Series S (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.3934/dcdss.2015.8.497

zbMATH Keywords

inverse problem; Monte Carlo method; uncertainties; Fisher matrix; Fourier optics; scatterometry; error model; line edge roughness

Mathematics Subject Classification ID

65C05: Monte Carlo methods

35P25: Scattering theory for PDEs

35R30: Inverse problems for PDEs

65T50: Numerical methods for discrete and fast Fourier transforms

34L25: Scattering theory, inverse scattering involving ordinary differential operators

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