Inverse problem of Mueller polarimetry for metrological applications

DOI10.1515/JIIP-2020-0140zbMATH Open1478.78036OpenAlexW3136855855MaRDI QIDQ2232097FDOQ2232097

Authors Tatiana Novikova, Pavel Bulkin 

Publication date 4 October 2021

Published in Journal of Inverse and Ill-posed Problems (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1515/jiip-2020-0140

zbMATH Keywords

critical dimensionsrigorous coupled wave analysisMueller polarimetryoptical metrology

Mathematics Subject Classification ID

Numerical optimization and variational techniques (65K10) Diffraction, scattering (78A45) PDEs in connection with optics and electromagnetic theory (35Q60) Waves and radiation in optics and electromagnetic theory (78A40) Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46) Optimization problems in optics and electromagnetic theory (78M50)

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