Inverse problem of Mueller polarimetry for metrological applications (Q2232097)
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scientific article; zbMATH DE number 7405828
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| English | Inverse problem of Mueller polarimetry for metrological applications |
scientific article; zbMATH DE number 7405828 |
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Inverse problem of Mueller polarimetry for metrological applications (English)
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4 October 2021
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Mueller polarimetry
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optical metrology
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critical dimensions
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rigorous coupled wave analysis
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0.7487339377403259
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0.7441275715827942
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0.696317195892334
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