Modeling aspects to improve the solution of the inverse problem in scatterometry (Q479110)
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scientific article; zbMATH DE number 6377095
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| English | Modeling aspects to improve the solution of the inverse problem in scatterometry |
scientific article; zbMATH DE number 6377095 |
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Modeling aspects to improve the solution of the inverse problem in scatterometry (English)
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5 December 2014
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scatterometry
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inverse problem
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uncertainties
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error model
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line edge roughness
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Fourier optics
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Fisher matrix
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Monte Carlo method
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0.7825772166252136
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0.6542525887489319
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0.6321064233779907
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0.6289891004562378
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0.6289891004562378
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