Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method
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Publication:259298
DOI10.1007/S10598-015-9303-0zbMath1332.78015OpenAlexW2320383587MaRDI QIDQ259298
Publication date: 11 March 2016
Published in: Computational Mathematics and Modeling (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s10598-015-9303-0
Diffraction, scattering (78A45) Finite volume methods, finite integration techniques applied to problems in optics and electromagnetic theory (78M12)
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