The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages (Q2476813)

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The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages
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    The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages (English)
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    12 March 2008
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    micro-motion stage
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    output compliance
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    flexure hinge equation
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