The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages

DOI10.1016/J.MECHMACHTHEORY.2007.03.007MaRDI QIDQ2476813zbMATH OpenOpenAlexFDO

Authors Y. K. Yong, Tien-Fu Lu

Publication date 12 March 2008

Published in Mechanism and Machine Theory (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.mechmachtheory.2007.03.007

zbMATH Keywords

flexure hinge equationmicro-motion stageoutput compliance

Mathematics Subject Classification ID

Kinematics of mechanisms and robots (70B15)

Recommendations

• Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges
• Design of symmetric conic-section flexure hinges based on closed-form compliance equations
• Accuracy of the planar compliant mechanisms
• Optimized flexural hinge shapes for microsystems and high-precision applications
• Dynamic analysis of a 5-DOF flexure-based nanopositioning stage

Cites work

• The constant-Jacobian method for kinematics of a three-DOF planar micro-motion stage

Cited in

(7)

• Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges
• Analytical modeling and FEM simulations of single-stage microleverage mechanism
• Design of symmetric conic-section flexure hinges based on closed-form compliance equations
• Dynamic analysis of a 5-DOF flexure-based nanopositioning stage
• A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: Design and experimental validation
• Accuracy of the planar compliant mechanisms
• Relationship among input-force, payload, stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator

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