Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock (Q6492879)
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scientific article; zbMATH DE number 7838592
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock |
scientific article; zbMATH DE number 7838592 |
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Size-dependent dynamic behavior of electrostatically actuated microaccelerometers under mechanical shock (English)
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26 April 2024
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mechanical shock
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microaccelerometers
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modified couple stress theory
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finite element method
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