Optimized allocation of defect inspection capacity with a dynamic sampling strategy (Q337310)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Optimized allocation of defect inspection capacity with a dynamic sampling strategy |
scientific article |
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Optimized allocation of defect inspection capacity with a dynamic sampling strategy (English)
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10 November 2016
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semiconductor manufacturing
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linear programming
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capacity planning
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inspections
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wafers at risk
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