Earl R. Lory
From MaRDI portal
Person:1915978
Available identifiers
zbMath Open lory.earl-rMaRDI QIDQ1915978
List of research outcomes
Publication | Date of Publication | Type |
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Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing | 1996-07-01 | Paper |
Research outcomes over time
Doctoral students
No records found.
Known relations from the MaRDI Knowledge Graph
Property | Value |
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MaRDI profile type | MaRDI person profile |
instance of | human |
This page was built for person: Earl R. Lory