Analysis and control of a scalar conservation law modeling a highly re-entrant manufacturing system (Q619875)

The paper is motivated by problems arising in the control of semiconductor manufacturing systems which are characterized by their highly re-entrant feature. The considered model is based on a scalar conversation law and has the form of some Cauchy problem with the velocity function possessing both the local and nonlocal character. The existence, uniqueness and regularity of the weak solution to the Cauchy problem with the initial and boundary data in \(L^{\infty}\) are proved. Stability of the solution and the out-flux with respect to the initial and boundary data are given. Also existence of the solution to the optimal control problem minimizing \(L^{p}\)-norm of the difference between the actual and any desired out-flux is proved.