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← Dynamics and Global Stability of Beam-based Electrostatic Microactuators (Q5327557)

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The following pages link to Dynamics and Global Stability of Beam-based Electrostatic Microactuators (Q5327557):

Displayed 2 items.

Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges (Q381906) ‎ (← links)
Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue (Q1016932) ‎ (← links)

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