Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges (Q381906)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges |
scientific article |
Statements
Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges (English)
0 references
15 November 2013
0 references
microelectromechanical systems
0 references
shape optimization
0 references
nonprismatic beams
0 references
pull-in instability
0 references
penalty method
0 references
finite element analysis
0 references
0 references
0 references
