Cycle time reduction via machine-to-operation qualification

DOI10.1080/00207540802452140MaRDI QIDQ3055218zbMATH OpenOpenAlexFDO

Authors James P. Ignizio

Publication date 7 November 2010

Published in International Journal of Production Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/00207540802452140

zbMATH Keywords

cycle timefactory productivitymachine availabilityoptimisationphotolithographysemiconductor manufacturing

Mathematics Subject Classification ID

Production models (90B30)

Recommendations

• Optimizing multiple qualifications of products on non-identical parallel machines
• Reduced simulation models of wafer fabrication facilities
• An optimization approach to capacity expansion in semiconductor manufacturing facilities
• Performance evaluation of photolithography cluster tools
• Overlapping machine groups in semiconductor water fabrication

Cites work

• Re-entrant lines

Cited in

(4)

• Overlapping machine groups in semiconductor water fabrication
• Stochastic programming for qualification management of parallel machines in semiconductor manufacturing
• Optimizing multiple qualifications of products on non-identical parallel machines
• Reduced simulation models of wafer fabrication facilities

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