Reduced simulation models of wafer fabrication facilities

DOI10.1080/002075499190473MaRDI QIDQ4497084zbMATH OpenOpenAlexFDO

Authors

Publication date 21 August 2000

Published in International Journal of Production Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/002075499190473

Mathematics Subject Classification ID

Production models (90B30)

Recommendations

• Cycle time reduction via machine-to-operation qualification
• An optimization approach to capacity expansion in semiconductor manufacturing facilities
• Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing
• Dynamic models of production with multiple operations and general processing times

Cited in

(7)

• Reducing simulation models for scheduling manufacturing facilities
• Cycle time reduction via machine-to-operation qualification
• An analysis of the ceiling height requirement for a large-scale semiconductor fab
• Architecture of a dynamic production controller in CIM enterprise environments
• Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
• Simplification in the simulation of manufacturing systems
• A total standard WIP estimation method for wafer fabrication

This page was built for publication: Reduced simulation models of wafer fabrication facilities

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4497084)