Design-tool for Rapid Thermal Processors for Optimal Trajectory Tracking

DOI10.1076/MCMD.9.1.1.16514MaRDI QIDQ4460003zbMATH OpenOpenAlexFDO

Authors Sung Je Kim, Y. M. Cho

Publication date 18 May 2004

Published in Mathematical and Computer Modelling of Dynamical Systems (Search for Journal in Brave)

Full work available at URL http://hdl.handle.net/10.1076/mcmd.9.1.1.16514

Mathematics Subject Classification ID

Design techniques (robust design, computer-aided design, etc.) (93B51) Application models in control theory (93C95)

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(6)

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• Model reduction for sliding mode control of rapid thermal processing system
• Optimal design of induction heating equipment for high‐speed processing of a semiconductor
• Application of the NEPSAC nonlinear predictive control strategy to a semiconductor reactor
• A lamp thermoelectricity based integrated bake/chill system for photoresist processing

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