Model reduction for sliding mode control of rapid thermal processing system

DOI10.1007/978-3-319-18290-2_19MaRDI QIDQ3193244zbMATH OpenOpenAlexFDO

Authors Tengfei Xiao, Han-Xiong Li

Publication date 16 October 2015

Published in Recent Advances in Sliding Modes: From Control to Intelligent Mechatronics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/978-3-319-18290-2_19

zbMATH Keywords

model reductionrapid thermal processing systemsliding mode controlsmall-order modelspectrum

Mathematics Subject Classification ID

System structure simplification (93B11) Variable structure systems (93B12) Eigenvalue problems (93B60) Application models in control theory (93C95)

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Cites work

• A queueing model for a nonreliable multiterminal system with polling scheduling

Cited in

(2)

• Design-tool for Rapid Thermal Processors for Optimal Trajectory Tracking
• Application of the NEPSAC nonlinear predictive control strategy to a semiconductor reactor

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