Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition

DOI10.1109/TC.2016.2582154MaRDI QIDQ2989515zbMATH OpenFDO

Authors Xing-Quan Li, Ziran Zhu, Wenxing Zhu

Publication date 8 June 2017

Published in IEEE Transactions on Computers (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1109/TC.2016.2582154

Mathematics Subject Classification ID

Combinatorial optimization (90C27)

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(1)

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