Investigation of silicon wafer defects by discrete source method.

MaRDI QIDQ2743536zbMATH OpenFDO

Authors Yu. A. Eremin, N. V. Orlov, A. G. Sveshnikov

Publication date 1997

Published in Matematicheskoe Modelirovanie (Search for Journal in Brave)

Full work available at URL http://mathnet.ru/eng/mm/v9/i8/p110

Mathematics Subject Classification ID

Physical optics (78A10) Diffraction, scattering (78A45)

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