Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution (Q1780467)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution |
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Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution (English)
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13 June 2005
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Surface roughness
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Line-edge roughness
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Dissolution
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Lattice models of polymer chains
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Monte Carlo method
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