Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution

DOI10.1016/j.matcom.2004.10.006zbMath1177.82137OpenAlexW1999856219MaRDI QIDQ1780467

G. P. Patsis

Publication date: 13 June 2005

Published in: Mathematics and Computers in Simulation (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.matcom.2004.10.006

zbMATH Keywords

Monte Carlo methodSurface roughnessDissolutionLattice models of polymer chainsLine-edge roughness

Mathematics Subject Classification ID

Cites Work

• Model for the Kinematics of Polymer Dissolution

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