An algorithm for smoothing three-dimensional Monte Carlo ion implantation simulation results (Q1826596)
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scientific article; zbMATH DE number 2081651
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| English | An algorithm for smoothing three-dimensional Monte Carlo ion implantation simulation results |
scientific article; zbMATH DE number 2081651 |
Statements
An algorithm for smoothing three-dimensional Monte Carlo ion implantation simulation results (English)
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6 August 2004
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Monte Carlo simulation
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Ion implantation
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Bernstein polynomials
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Smoothing operator
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0.6860946416854858
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0.6780661940574646
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0.6737088561058044
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