An asymptotic analysis of the kick-out diffusion mechanism (Q1898024)
From MaRDI portal
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | An asymptotic analysis of the kick-out diffusion mechanism |
scientific article |
Statements
An asymptotic analysis of the kick-out diffusion mechanism (English)
0 references
20 September 1995
0 references
The kick-out model for the diffusion of impurity in III--V semiconductors is studied. Asymptotic solutions are derived for one- and two-dimensional surface source problems. A mechanism for the destruction of self- interstitials, for 1D case, is given. The calculated diffusion profiles have shapes which are typical. For the 2D case, contours of constant impurity concentration are calculated and some are found to have the ``bird's beak'' shape, which is frequently observed in experiments.
0 references
bird's beak shape
0 references
kick-out model
0 references
diffusion of impurity
0 references
semiconductors
0 references