Investigation on high-frequency and mode-coupling vibrations in thickness-extensional piezoelectric thin-film resonators with initial stress (Q2110749)

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Investigation on high-frequency and mode-coupling vibrations in thickness-extensional piezoelectric thin-film resonators with initial stress
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    Investigation on high-frequency and mode-coupling vibrations in thickness-extensional piezoelectric thin-film resonators with initial stress (English)
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    23 December 2022
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    piezoelectric thin-film resonator
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    initial stress
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    high-frequency vibration
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    wave propagation
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    frequency control
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