Systematic design of high-\(Q\) prestressed micro membrane resonators (Q2176910)
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English | Systematic design of high-\(Q\) prestressed micro membrane resonators |
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Systematic design of high-\(Q\) prestressed micro membrane resonators (English)
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6 May 2020
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topology optimization
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prestressed membranes
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resonators
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quality factor
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frequency-quality factor
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