The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with t-shaped paddle in the presence of fringing field (Q2310654)

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The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with t-shaped paddle in the presence of fringing field
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    The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with t-shaped paddle in the presence of fringing field (English)
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    6 April 2020
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    microbeam
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    pull in instability
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    capillary force
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    Casimir force
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    van der Waals force
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    primary resonance
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