The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with t-shaped paddle in the presence of fringing field (Q2310654)
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English | The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with t-shaped paddle in the presence of fringing field |
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The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with t-shaped paddle in the presence of fringing field (English)
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6 April 2020
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microbeam
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pull in instability
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capillary force
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Casimir force
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van der Waals force
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primary resonance
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