Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage (Q2330367)
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scientific article; zbMATH DE number 7120095
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| English | Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage |
scientific article; zbMATH DE number 7120095 |
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Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage (English)
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22 October 2019
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EUPI
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fuzzy
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hysteresis compensation
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micro position stage
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sliding-mode-like-control
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0.778992772102356
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0.7549143433570862
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0.7503480911254883
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0.7478021383285522
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