A multi-scale simulation of tungsten film delamination from silicon substrate (Q2385899)

From MaRDI portal

!

This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use the normal view instead:

scientific article; zbMATH DE number 5201079
Language Label Description Also known as
default for all languages
No label defined
    English
    A multi-scale simulation of tungsten film delamination from silicon substrate
    scientific article; zbMATH DE number 5201079

      Statements

      A multi-scale simulation of tungsten film delamination from silicon substrate (English)
      0 references
      0 references
      0 references
      15 October 2007
      0 references
      Multi-scale simulation
      0 references
      film delamination
      0 references
      molecular dynamics
      0 references
      size effect
      0 references

      Identifiers