A multi-scale simulation of tungsten film delamination from silicon substrate
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Publication:2385899
DOI10.1016/j.ijsolstr.2005.02.021zbMath1119.74589OpenAlexW2094333573MaRDI QIDQ2385899
Publication date: 15 October 2007
Published in: International Journal of Solids and Structures (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ijsolstr.2005.02.021
Finite element methods applied to problems in solid mechanics (74S05) Fracture and damage (74R99) Thin films (74K35)
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