A multi-scale simulation of tungsten film delamination from silicon substrate
From MaRDI portal
Publication:2385899
DOI10.1016/j.ijsolstr.2005.02.021zbMath1119.74589MaRDI QIDQ2385899
Publication date: 15 October 2007
Published in: International Journal of Solids and Structures (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ijsolstr.2005.02.021
74S05: Finite element methods applied to problems in solid mechanics
74R99: Fracture and damage
74K35: Thin films
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