Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques (Q2397223)
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scientific article; zbMATH DE number 6723826
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| English | Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques |
scientific article; zbMATH DE number 6723826 |
Statements
Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques (English)
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30 May 2017
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phase change
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polymer resists
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coating flow
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0.7925722599029541
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0.7851033806800842
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0.7558733224868774
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0.7501802444458008
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0.7498242259025574
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