Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques (Q2397223)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques |
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Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques (English)
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30 May 2017
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phase change
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polymer resists
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coating flow
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