Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon (Q254154)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon |
scientific article |
Statements
Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon (English)
0 references
8 March 2016
0 references
