Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon (Q254154)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon |
scientific article; zbMATH DE number 6551669
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon |
scientific article; zbMATH DE number 6551669 |
Statements
Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon (English)
0 references
8 March 2016
0 references
0.6512455344200134
0 references
0.6491870880126953
0 references
0.6463044881820679
0 references
0.6369336843490601
0 references
0.634809672832489
0 references
