Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon

DOI10.1134/S0005117915120140zbMath1332.93044OpenAlexW2208293361MaRDI QIDQ254154

A. R. Bestugin, P. A. Okin, I. A. Kirshina, O. M. Filonov

Publication date: 8 March 2016

Published in: Automation and Remote Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s0005117915120140

Mathematics Subject Classification ID

Observability (93B07)

Cites Work

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