Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon

DOI10.1134/S0005117915120140MaRDI QIDQ254154zbMATH OpenOpenAlexFDO

Authors A. R. Bestugin, I. A. Kirshina, P. A. Okin, O. M. Filonov

Publication date 8 March 2016

Published in Automation and Remote Control (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1134/s0005117915120140

Mathematics Subject Classification ID

Observability (93B07)

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(2)

• Factors influencing output nonlinearity error of a high-precision load sensor and the error calculation
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