Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon

DOI10.1134/S0005117915120140zbMATH Open1332.93044OpenAlexW2208293361MaRDI QIDQ254154FDOQ254154

Authors: A. R. Bestugin, I. A. Kirshina, P. A. Okin, O. M. Filonov 

Publication date: 8 March 2016

Published in: Automation and Remote Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s0005117915120140

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Mathematics Subject Classification ID

Observability (93B07)

Cites Work

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Cited In (2)

• Analytical calculation of sensitivity for capacitive pressure transducers
• Factors influencing output nonlinearity error of a high-precision load sensor and the error calculation

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