Accuracy errors of modeling of MIS-transistor sensor elements
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Publication:828518
DOI10.1134/S0005117920100094zbMATH Open1484.78009OpenAlexW3104987058MaRDI QIDQ828518FDOQ828518
Authors: B. I. Podlepetsky
Publication date: 9 January 2021
Published in: Automation and Remote Control (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1134/s0005117920100094
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Technical applications of optics and electromagnetic theory (78A55) Statistical mechanics of semiconductors (82D37)
Cites Work
Cited In (6)
- Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon
- Radiation sensitivity modeling technique of sensors' MIS-transistor elements
- Modeling of radiation sensitivity of hydrogen sensors based on MISFET
- Some consequences of sensor error in a model for passive detection
- Methods and tools for evaluating the characteristics of MIS-capacitor gas sensors
- Integrated hydrogen sensors based on MIS transistor sensitive elements: modeling of characteristics
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