Methods and tools for evaluating the characteristics of MIS-capacitor gas sensors

DOI10.1134/S00051179220100162MaRDI QIDQ2689586zbMATH OpenOpenAlexFDO

Authors B. I. Podlepetsky, N. N. Samotaev, M. O. Etrekova, Alexey Litvinov

Publication date 13 March 2023

Published in Automation and Remote Control (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1134/s00051179220100162

zbMATH Keywords

capacitance-voltage characteristicgas-sensitive MIS capacitorMIS structureoutput signal

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Electrochemistry (78A57) Chemistry (92E99)

Recommendations

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Cites work

• Integrated hydrogen sensors based on MIS transistor sensitive elements: modeling of characteristics

Cited in

(5)

• Radiation sensitivity modeling technique of sensors' MIS-transistor elements
• Physical principles of operation of oxidizing gas sensors based on metal oxide semiconductors
• Modeling of radiation sensitivity of hydrogen sensors based on MISFET
• Integrated hydrogen sensors based on MIS transistor sensitive elements: modeling of characteristics
• Accuracy errors of modeling of MIS-transistor sensor elements

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