Methods and tools for evaluating the characteristics of MIS-capacitor gas sensors (Q2689586)
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scientific article; zbMATH DE number 7662440
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| English | Methods and tools for evaluating the characteristics of MIS-capacitor gas sensors |
scientific article; zbMATH DE number 7662440 |
Statements
Methods and tools for evaluating the characteristics of MIS-capacitor gas sensors (English)
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13 March 2023
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MIS structure
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capacitance-voltage characteristic
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gas-sensitive MIS capacitor
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output signal
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0.7953062057495117
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0.7263316512107849
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0.703570544719696
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0.6706504821777344
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0.6487665772438049
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