Theory of vibrating diaphragm-type pressure sensor

DOI10.2514/3.12031MaRDI QIDQ4292286zbMATH OpenOpenAlexFDO

Authors Youhe Zhou, Kai-Yuan Yeh, F. P. J. Rimrott

Publication date 4 October 1994

Published in AIAA Journal (Search for Journal in Brave)

Full work available at URL https://doi.org/10.2514/3.12031

zbMATH Keywords

series solutioncircular thin platesaxisymmetric free vibrationvon Kármán equationthird- order algebraic characteristic value problem

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Plates (74K20)

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Cited in

(4)

• Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon
• Analytical calculation of sensitivity for capacitive pressure transducers
• Geometrically nonlinear axisymmetric response of thin circular plate under piezoelectric actuation
• Thickness-shear vibration of circular crystal plate in cylindrical shell as pressure sensor

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