Theory of vibrating diaphragm-type pressure sensor

DOI10.2514/3.12031zbMATH Open0796.73038OpenAlexW2095161029MaRDI QIDQ4292286FDOQ4292286

Authors: Youhe Zhou, Kai-Yuan Yeh, F. P. J. Rimrott 

Publication date: 4 October 1994

Published in: AIAA Journal (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.2514/3.12031

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zbMATH Keywords

series solutioncircular thin platesaxisymmetric free vibrationvon Kármán equationthird- order algebraic characteristic value problem

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Plates (74K20)

Cited In (4)

• Analytical calculation of sensitivity for capacitive pressure transducers
• Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon
• Geometrically nonlinear axisymmetric response of thin circular plate under piezoelectric actuation
• Thickness-shear vibration of circular crystal plate in cylindrical shell as pressure sensor

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