Studies on deep ultraviolet transparent conductive Ga\(_2O_3\)/ITO/Ga\(_2O_3\) films (Q2895237)
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scientific article; zbMATH DE number 6052035
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| English | Studies on deep ultraviolet transparent conductive Ga\(_2O_3\)/ITO/Ga\(_2O_3\) films |
scientific article; zbMATH DE number 6052035 |
Statements
2 July 2012
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Ca\(_2\)O\(_3\) ceramic target
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deep ultraviolet transparent conductive film
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Ga\(_2\)O\(_3\)/ITO/Ga\(_2\)O\(_3\) films
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electrical and optical property
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Studies on deep ultraviolet transparent conductive Ga\(_2O_3\)/ITO/Ga\(_2O_3\) films (English)
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0.6994129419326782
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0.6484537124633789
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0.6350276470184326
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0.6098716855049133
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