Numerical modeling of a MEMS actuator considering several magnetic force calculation methods (Q2970481)
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scientific article; zbMATH DE number 6698335
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| English | Numerical modeling of a MEMS actuator considering several magnetic force calculation methods |
scientific article; zbMATH DE number 6698335 |
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Numerical modeling of a MEMS actuator considering several magnetic force calculation methods (English)
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30 March 2017
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actuators
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MEMS
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force measurement
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